White Light Interferometers – Optical Profilers 
for non-contact 3D surface metrology

Nanounity is a distributor of white light interferometers,
commonly referred to as optical profilers
Optical profilers are used to acquire 3D surface profile measurements, step height, surface roughness, shape and geometry.  White light interferometry offers fast non-contact measurements with high accuracy and precision.

Nanounity distributes Pemtron 3D optical surface profilers.  Pemtron manufactures optical profilers to analyze a range of samples from small devices to large formfactor substrates.  We offer laboratory bench top instruments for R&D and QA/QC, to advanced automated systems for 3D metrology in manufacturing environments for LED, solar, MEMS, and semiconductor. Pemtron has a 3D optical solution for standard and custom applications.

Pemtron Hawk3D optical surface profilers:
Pemtron white light interferometers deliver high-resolution images and surface measurements over a wide range of sample types and applications.

0.1 nm vertical resolution
White light interferometry is a well-established method for capturing high-resolution Z measurements. Hawk3D optical profilers utilize high resolution and linear PZT nano-stages with Z-axis feedback to provide sub nanometer vertical resolution and repeatability, regardless of magnification or field of view.

Fast measurement of surfaces means more productivity
Optical methods enable high-speed measurements for the laboratory or manufacturing floor. Hawk3D optical profilers can acquire low noise and high-speed precision measurements over a broad range of surfaces. White light interferometry can make the measurement in seconds providing quick time to results.

0.3% (3sigma) measurement repeatability
Hawk3D delivers highly repeatable non-contact optical measurements produced by robust optics, software and mechanics. The system has a ridged mechanical design coupled with vibration isolation that provides high-resolution images, delivering the data required to make critical decision for your development, quality assurance or manufacturing lines.

Applications

• Semiconductor wafer, bump, patterns
• Coatings
• Thin films
• MEMS devices
• Optics
• High density interconnect packaging
• Automotive
• Aerospace
• Medical devices

Hawk3D system specification

Model	PW-3300	PW-2200
Measuring Principle	White light interferometry
Scanner	Closed-loop PZT nano-stage
Vertical resolution	0.1nm
Objective system	Interferometric lens/5 lens rotational turret
Scanning range	250 μm (optional 5mm fine motor)
Sample stage stroke (motorized or manual)	Motor XY=300mm	MotorXY = 200mm
	Motor Z = 100mm	Motor Z = 50mm
	Motor tilt = ±3°	Manual tilt = ±3°
Vertical scan speed	High accuracy mode: 20 μm/sec
	High speed mode: 50 μm/sec
Stage dimensions	310mm x 300mm	200mm x 200mm

Objectives and camera

Objective magnification	2.5x	5x	10x	20x	50x	100x
Lateral resolution μm	2.96	1.48	0.47	0.37	0.15	0.07
Field of view (FOV) μm	1894 x 1420	947 x 710	474 x 355	237 x 178	93 x 71	47 x 36
Camera pixel	640 x 480 pixel (optional 1024 x 768 pixel)
Camera pixel resolution	7.4 μm

Contact; Nanounity at info@nanounity.com for more information about the Hawk3D optical surface profiler, or feel free to call us at (408) 235-8888.