Nano Positioning Stages

Invenios is a manufacture of precision linear and rotary stages, piezo flexures, anthropomorphic platforms and PC based control components; serving OEMs, niche markets and project based micro and nano platform requirements. Unlike other nanopositioning component suppliers, Invenios components achieve high static and dynamic stiffness enabling them to not only align, but also hold alignment during critical assembly processes such as bonding or attach operations. 

The precision of Invenios components reduces the need for “tweaking” hardware and software to achieve you micron and sub-micron applications. The result is higher alignment precision, higher throughput and elimination of rework required by less robust nanopositioning solutions. 

Invenios components and platforms are used in the following applications and markets:

Precision linear and rotary stages 

Invenios scalable precision ball-screw driven stages meet the demanding nanopositioning requirements in applications employing short to medium travel ranges. The nano series uses patented bearing technology that achieves sub-micron out-of-plane motion, only .05 µm over 10 mm and a dual-loop feedback option to achieve precision linear resolution and repeatability of 1 nm.

Reference series stages 

The Invenios reference series meets tighter tolerances (<10nm over 10mm straightness) on the ball-screw and bearing components for demanding applications such as atomic force microscopes, stylus profilers, nano-scale machining and printing. Invenios stages can be assembled into more complex rectilinear motion applications without need of interposing mounting plates, thus increasing the available acceleration for nano-robotic applications.

Anthropomorphic assembly platforms 

The InvenioSix assembly platform delivers long range translation (±15mm) and rotation (± 15º) designed to meet the most demanding 6 degree-of-freedom alignment and assembly applications. Unlike most anthropomorphic nanopositioners that use sliding bearing elements to couple motions to the platform output, the InvenioSix employs a tripod structure that couples the motions from x-y nanopositioners at the base of each leg to the platform output with proprietary rotary flexures that provide direct coupling without backlash and other sources of “lost” motion. The result is high static and dynamic stiffness on the nano-scale that makes the InvenioSix the ideal choice in high force applications including tri-color optical alignment in light engines and high performance color imaging systems. The InvenioSix has mounting surfaces on two planes and can be mounted up-right, upside-down and on its side.

Flexure Stages

InvenioFlex series of dual axis, piezo driven flexures achieve extended range of motion scalable from 25 µm to 500 µm with 16 bit dynamic range in an industrially hardened package. All stages have closed-loop feedback with extremely low out-of-plane motion.

Please contact Nanounity to discuss your nanopositioning requirements and get more detail on our custom precision solutions.